著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Claeys, Cor L. and Electrochemical Society. Meeting and Electrochemical Society",ULSI process integration 7,,Electrochemical Society,2011,ECS transactions,,9781566779074,,https://cir.nii.ac.jp/crid/1130282269627964928