著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
Symposium on Photomask Technology and BACUS (Technical group),"11th Annual Symposium on Photomask Technology : September 25-27, 1991, Sunnyvale, California",,SPIE,1992,Proceedings,,081940733X,,https://cir.nii.ac.jp/crid/1130282269670493952