著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Karam, Jean Michel and Yasaitis, John and Semiconductor Equipment and Materials International and Society of Photo-optical Instrumentation Engineers","Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA",,SPIE,1995,Proceedings,,0819442852,,https://cir.nii.ac.jp/crid/1130282269731500544