著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Glendinning, William B. and Helbert, John N.","Handbook of VLSI microlithography : principles, technology, and applications",,Noyes Publications,1991,Materials science and process technology series,,0815512813,,https://cir.nii.ac.jp/crid/1130282269746471040