著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Blais, Phillip D. and Society of Photo-optical Instrumentation Engineers","Electron-beam, X-ray, and ion-beam techniques for submicron lithographies II : March 14-15, 1983, Santa Clara, California",,SPIE,1983,Proceedings,,0892524286,,https://cir.nii.ac.jp/crid/1130282269764494208