著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Kahn, Harold","Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.",,Materials Research Society,2000,Materials Research Society symposium proceedings,,1558995676,,https://cir.nii.ac.jp/crid/1130282269789116160