著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Ehrlich, Daniel J. and Tsao, Jeffrey Y. and Batchelder, John Samuel and Society of Photo-optical Instrumentation Engineers","Lasers in microlithography : 2-3 March 1987, Santa Clara, California",,The Society,1987,Proceedings,,0892528095,,https://cir.nii.ac.jp/crid/1130282269862022400