著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Silicon Materials Science and Technology and Huff, Howard R. and Fabry, Laszlo and Kishino, Seigo and Electrochemical Society. Electronics Division",Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology,,The Electrochemical Society,2002,Proceedings,,"1566773741,1566773687,1566773733",,https://cir.nii.ac.jp/crid/1130282269895228928