著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Mackay, R. Scott and Society of Photo-optical Instrumentation Engineers and International SEMATECH","Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA",,SPIE,2005,Proceedings,,"0819457310,0819457310",,https://cir.nii.ac.jp/crid/1130282269903092736