著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Willson, C. G. (C. Grant) and Society of Photo-optical Instrumentation Engineers","Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California",,SPIE--the International Society for Optical Engineering,1986,Proceedings,,0892526661,,https://cir.nii.ac.jp/crid/1130282269915405568