著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Wong, S. Simon and Furukawa, Seijiro and Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications V and Materials Research Society","Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.",,Materials Research Society,1990,Materials Research Society conference proceedings,,1558990682,,https://cir.nii.ac.jp/crid/1130282270087650176