著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Santos, Héctor J. de los",RF MEMS circuit design for wireless communications,,Artech House,2002,MEMS--Microelectromechanical systems series,,1580533299,,https://cir.nii.ac.jp/crid/1130282270102571904