著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Chang, Shih-Chia and Pang, Stella W. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and United States. National Institute of Standards and Technology","Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas",,SPIE,1997,Proceedings,,0819426555,,https://cir.nii.ac.jp/crid/1130282270157768960