著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Ruska, W. Scot (Walter Scot)",Microelectronic processing : an introduction to the manufacture of integrated circuits,,McGraw-Hill,1987,McGraw-Hill series in electrical engineering,,"0070542805,0070542813",,https://cir.nii.ac.jp/crid/1130282270198586112