著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Design and Process Integration for Microelectronic Manufacturing (Conference) and Liebmann, Lars W. and Society of Photo-optical Instrumentation Engineers and International SEMATECH","Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA",,SPIE,2005,Proceedings,,0819457361,,https://cir.nii.ac.jp/crid/1130282270211791744