著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Lee, Hong H.",Fundamentals of microelectronics processing,,McGraw-Hill,1990,McGraw-Hill chemical engineering series,,"0070370567,0071007962",,https://cir.nii.ac.jp/crid/1130282270221924864