Author,Title,Edition,Publisher,Year,Series,Number,ISBN,ISSN,URL
"McGuire, G. E.",Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI),,Noyes Publications,1988,Materials science and process technology series,,0815511507,,https://cir.nii.ac.jp/crid/1130282270239181440