著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Peckerar, Martin Charles and Society of Photo-optical Instrumentation Engineers","Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing : 6-7 March 1991, San Jose, California",,SPIE,1991,Proceedings,,0819405647,,https://cir.nii.ac.jp/crid/1130282270249156096