著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Syms, Richard R. A. and Society of Photo-optical Instrumentation Engineers and European Optical Society and Institution of Electrical Engineers and Institution of Mechanical Engineers (Great Britain)","Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom",,SPIE,2000,Proceedings,,0819437123,,https://cir.nii.ac.jp/crid/1130282270259223040