著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Wilson, Syd R. and Tracy, Clarence J. and Freeman, John L.","Handbook of multilevel metallization for integrated circuits : materials, technology, and applications",,Noyes Publications,1993,Materials science and process technology series,,0815513402,,https://cir.nii.ac.jp/crid/1130282270267748480