著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing and Kolbesen, Bernd O. and Electrochemical Society. Electronics Division and Symposium on Silicon Cleaning Technology and Electrochemical Society. Meeting and International Society of Electrochemistry. Meeting","Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II",,Electrochemical Society,1997,Proceedings,,1566771757,,https://cir.nii.ac.jp/crid/1130282270321709312