著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Wilson, Alan D. and Brookhaven National Laboratory. National Synchrotron Light Source and Society of Photo-optical Instrumentation Engineers","X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York",,S.P.I.E.-- International Society for Optical Engineering,1984,Proceedings,,0892524839,,https://cir.nii.ac.jp/crid/1130282270353202304