著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"LaVan, David A. and da Silva, Mark G. and Spearing, S. Mark and Vengallatore, Srikar","Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.",,Materials Research Society,2008,Materials Research Society symposium proceedings,,9781558999909,,https://cir.nii.ac.jp/crid/1130282270377624448