著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Process Physics and Modeling in Semiconductor Technology and Srinivasan, G. R. and Plummer, J. and Antoniadis, D. and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectrics and Insulation Division and Electrochemical Society. Meeting",Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology,,Electrochemical Society,1988,Proceedings,,,,https://cir.nii.ac.jp/crid/1130282270413936384