著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Higashi, Gregg S. and Irene, Eugene A. and 大見, 忠弘 and Materials Research Society. Meeting (1993 : San Francisco, Calif.). Symposium Y",Surface chemical cleaning and passivation for semiconductor processing,,Materials Research Society,1993,Materials Research Society symposium proceedings,,1558992138,,https://cir.nii.ac.jp/crid/1130282270423689472