著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Howard, R. E. (Richard Edwin) and Symposium on the Science and Technology of Microfabrication and Materials Research Society. Meeting and Materials Research Society","Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.",,Materials Research Society,1987,Materials Research Society symposium proceedings,,0931837421,,https://cir.nii.ac.jp/crid/1130282270470329728