著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Liehr, Michael","Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA",,Materials Research Society,1995,Materials Research Society symposium proceedings,,1558992898,,https://cir.nii.ac.jp/crid/1130282270476862976