著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Depla, D. (Diederik) and Mahieu, S. (Stijn)",Reactive sputter deposition,,Springer,2008,Springer series in materials science,,9783540766629,,https://cir.nii.ac.jp/crid/1130282270605943936