著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "International Symposium on High Purity Silicon and Claeys, Cor L. and Electrochemical Society. Electronics Division",Proceedings of the Fourth International Symposium on High Purity Silicon,,Electrochemical Society,1996,Proceedings,,1566771560,,https://cir.nii.ac.jp/crid/1130282270640406016