著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Patterning Science and Technology and Greene, Wayne and Hefferon, George J. and White, L. K. and Herndon, Terry O. and Wu, Andrew L. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division",Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI,,Electrochemical Society,1992,Proceedings,,1566770076,,https://cir.nii.ac.jp/crid/1130282270683172864