著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Rodder, Mark. and Tsuchiya Toshiaki and Burnett, David and Wristers, Dirk and SPIE--the International Society for Optical Engineering","Microelectronic Device Technology : 1-2 October 1997, Austin, Texas",,SPIE,1997,Proceedings,,081942644X,,https://cir.nii.ac.jp/crid/1130282270715322496