著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Ziebart, Volker",Mechanical properties of CMOS thin films : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of doctor of natural sciences,,Hartung-Gorre,1999,Diss. ETH,,3896495194,,https://cir.nii.ac.jp/crid/1130282270739796992