著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Motamedi, M. Edward and Göring, Rolf and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and Solid State Technology (Organization) and Sandia National Laboratories","MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA",,SPIE,2000,Proceedings,,0819438340,,https://cir.nii.ac.jp/crid/1130282270756018944