著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Motamedi, M. Edward and Göring, Rolf and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International","MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA",,SPIE,2001,Proceedings,,0819442895,,https://cir.nii.ac.jp/crid/1130282270765523456