著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Lange, D. and Brand, Oliver and Baltes, H. (Henry)",CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications,,Springer-Verlag,2002,Microtechnology and MEMS,,3540431438,,https://cir.nii.ac.jp/crid/1130282270775959296