著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Schafft, Harry A.",ARPA/NBS workshop I. measurement problems in integrated circuit processing and assembly,,U.S. G.P.O.,1974,NBS special publication,,,,https://cir.nii.ac.jp/crid/1130282270788146176