著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Markus, Karen W. and Semiconductor Equipment and Materials International and National Institute of Standards and Technology (U.S.) and Society of Photo-optical Instrumentation Engineers","Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas",,SPIE,1995,Proceedings,,0819420050,,https://cir.nii.ac.jp/crid/1130282270811459328