著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Bowden, M. J. and Society of Photo-optical Instrumentation Engineers","Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California",,SPIE,1987,Proceedings,,0892528060,,https://cir.nii.ac.jp/crid/1130282270855147008