著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Blais, Phillip D. and Society of Photo-optical Instrumentation Engineers","Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California",,The Society,1987,Proceedings,,0892528087,,https://cir.nii.ac.jp/crid/1130282270937001472