著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Graff, Klaus",Metal impurities in silicon-device fabrication,,Springer-Verlag,1995,Springer series in materials science,,"3540583173,0387583173",,https://cir.nii.ac.jp/crid/1130282270973784192