著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Wagner, Alfred and International Society for Hybrid Microelectronics","Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III : March 15-16, 1984, Santa Clara, California",,S.P.I.E.-- International Society for Optical Engineering,1984,Proceedings,,0892525061,,https://cir.nii.ac.jp/crid/1130282270974214272