著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th : 1999 : Munich, Germany) and Behringer, Uwe and VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik and Forschungszentrum Karlsruhe. Institute for Microstructure Technology and Society of Photo-optical Instrumentation Engineers","16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany",,SPIE,2000,Proceedings,,0819436143,,https://cir.nii.ac.jp/crid/1130282270976908160