著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Zwicker, Gerfield and Materials Research Society. Spring Meeting and Advances and Challenges in Chemical Mechanical Planarization","Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.",,Materials Research Society,2007,Materials Research Society symposium proceedings,,9781558999510,,https://cir.nii.ac.jp/crid/1130282271048374144