著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Chapman, Brian N.",Glow discharge processes : sputtering and plasma etching,,Wiley,1980,A Wiley-Interscience publication,,047107828X,,https://cir.nii.ac.jp/crid/1130282271090059520