著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Novembre, Anthony E. and Society of Photo-optical Instrumentation Engineers","Advances in resist technology and processing IX : 9-10 March 1992, San Jose, California",,SPIE,1992,Proceedings,,0819408271,,https://cir.nii.ac.jp/crid/1130282271159896192