著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Jaeger, Richard C.",Introduction to microelectronic fabrication,,Addison-Wesley Pub. Co.,1993,Modular series on solid state devices,,0201146959,,https://cir.nii.ac.jp/crid/1130282271169044864