著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
BACUS (Technical group),"13th Annual Symposium on Photomask Technology and Management : 22-23 September 1993, Santa Clara, California",,SPIE,1994,Proceedings,,0819413569,,https://cir.nii.ac.jp/crid/1130282271185120384