著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
Riley Terrence J.,"Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.",,Materials Research Society,1997,Materials Research Society symposium proceedings,,1558993746,,https://cir.nii.ac.jp/crid/1130282271216753536