著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on High Purity Silicon and Claeys, Cor L. and Electrochemical Society. Electronics Division",Proceedings of the Fifth International Symposium on High Purity Silicon V,,Electrochemical Society,1998,Proceedings,,1566772079,,https://cir.nii.ac.jp/crid/1130282271278597760