著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Boyd, Ian W.","Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators",,Springer-Verlag,1987,Springer series in materials science,,"0387179518,3540179518",,https://cir.nii.ac.jp/crid/1130282271311947264